com.sun.electric.technology.technologies.nmos.xml Maven / Gradle / Ivy
<?xml version="1.0" encoding="UTF-8"?>
<!--
*
* Electric(tm) VLSI Design System
*
* File: nmos.xml
* nmos technology description
* Generated automatically from a library
*
* Copyright (c) 2008, Oracle and/or its affiliates. All rights reserved.
*
* Electric(tm) is free software; you can redistribute it and/or modify
* it under the terms of the GNU General Public License as published by
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* (at your option) any later version.
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* Electric(tm) is distributed in the hope that it will be useful,
* but WITHOUT ANY WARRANTY; without even the implied warranty of
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* GNU General Public License for more details.
*
* You should have received a copy of the GNU General Public License
* along with Electric(tm); see the file COPYING. If not, write to
* the Free Software Foundation, Inc., 59 Temple Place, Suite 330,
* Boston, Mass 02111-1307, USA.
*/
-->
<technology name="nmos"
xmlns="http://electric.sun.com/Technology"
xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance"
xsi:schemaLocation="http://electric.sun.com/Technology ../../technology/Technology.xsd">
<shortName>nMOS</shortName>
<description>nMOS (Mead & Conway abstract rules)</description>
<version tech="1" electric="8.05g"/>
<version tech="2" electric="8.05o"/>
<numMetals min="1" max="1" default="1"/>
<scale value="2000.0" relevant="true"/>
<defaultFoundry value="NONE"/>
<minResistance value="50.0"/>
<minCapacitance value="50.0"/>
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<primitivePort name="bur-poly-bottom">
<portAngle primary="270" range="45"/>
<portTopology>0</portTopology>
<box khy="-1.0">
<lambdaBox klx="0.0" khx="0.0" kly="-1.0" khy="-1.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
<primitivePort name="bur-poly-top">
<portAngle primary="90" range="45"/>
<portTopology>0</portTopology>
<box kly="1.0">
<lambdaBox klx="0.0" khx="0.0" kly="1.0" khy="1.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
</primitiveNode>
<primitiveNode name="Transistor" fun="TRANMOS">
<diskOffset untilVersion="1" x="3.0" y="3.0"/>
<diskOffset untilVersion="2" x="1.0" y="1.0"/>
<nodeBase>
<box>
<lambdaBox klx="-1.0" khx="1.0" kly="-1.0" khy="1.0"/>
</box>
</nodeBase>
<nodeLayer layer="Polysilicon" style="FILLED">
<serpbox lWidth="1.0" rWidth="1.0" tExtent="2.0" bExtent="2.0">
<lambdaBox klx="-3.0" khx="3.0" kly="-1.0" khy="1.0"/>
</serpbox>
</nodeLayer>
<nodeLayer layer="Diffusion" style="FILLED" portNum="3" electrical="true">
<serpbox kly="0.0" lWidth="3.0" rWidth="0.0" tExtent="0.0" bExtent="0.0">
<lambdaBox klx="-1.0" khx="1.0" kly="0.0" khy="3.0"/>
</serpbox>
</nodeLayer>
<nodeLayer layer="Diffusion" style="FILLED" portNum="1" electrical="true">
<serpbox khy="0.0" lWidth="0.0" rWidth="3.0" tExtent="0.0" bExtent="0.0">
<lambdaBox klx="-1.0" khx="1.0" kly="-3.0" khy="0.0"/>
</serpbox>
</nodeLayer>
<nodeLayer layer="Diffusion" style="FILLED" electrical="false">
<serpbox lWidth="3.0" rWidth="3.0" tExtent="0.0" bExtent="0.0">
<lambdaBox klx="-1.0" khx="1.0" kly="-3.0" khy="3.0"/>
</serpbox>
</nodeLayer>
<primitivePort name="trans-poly-left">
<portAngle primary="180" range="85"/>
<portTopology>0</portTopology>
<box khx="-1.0">
<lambdaBox klx="-2.0" khx="-2.0" kly="0.0" khy="0.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
<primitivePort name="trans-diff-top">
<portAngle primary="90" range="85"/>
<portTopology>1</portTopology>
<box kly="1.0">
<lambdaBox klx="0.0" khx="0.0" kly="2.0" khy="2.0"/>
</box>
<portArc>Diffusion</portArc>
</primitivePort>
<primitivePort name="trans-poly-right">
<portAngle primary="0" range="85"/>
<portTopology>0</portTopology>
<box klx="1.0">
<lambdaBox klx="2.0" khx="2.0" kly="0.0" khy="0.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
<primitivePort name="trans-diff-bottom">
<portAngle primary="270" range="85"/>
<portTopology>3</portTopology>
<box khy="-1.0">
<lambdaBox klx="0.0" khx="0.0" kly="-2.0" khy="-2.0"/>
</box>
<portArc>Diffusion</portArc>
</primitivePort>
<serpTrans>
<specialValue>3.0</specialValue>
<specialValue>1.0</specialValue>
<specialValue>1.0</specialValue>
<specialValue>2.0</specialValue>
<specialValue>1.0</specialValue>
<specialValue>1.0</specialValue>
</serpTrans>
</primitiveNode>
<primitiveNode name="Implant-Transistor" fun="TRADMOS">
<diskOffset untilVersion="1" x="3.0" y="3.0"/>
<diskOffset untilVersion="2" x="1.0" y="1.0"/>
<nodeBase>
<box>
<lambdaBox klx="-1.0" khx="1.0" kly="-1.0" khy="1.0"/>
</box>
</nodeBase>
<nodeLayer layer="Polysilicon" style="FILLED">
<serpbox lWidth="1.0" rWidth="1.0" tExtent="2.0" bExtent="2.0">
<lambdaBox klx="-3.0" khx="3.0" kly="-1.0" khy="1.0"/>
</serpbox>
</nodeLayer>
<nodeLayer layer="Diffusion" style="FILLED" electrical="false">
<serpbox lWidth="3.0" rWidth="3.0" tExtent="0.0" bExtent="0.0">
<lambdaBox klx="-1.0" khx="1.0" kly="-3.0" khy="3.0"/>
</serpbox>
</nodeLayer>
<nodeLayer layer="Implant" style="FILLED" portNum="-1">
<serpbox lWidth="2.5" rWidth="2.5" tExtent="1.5" bExtent="1.5">
<lambdaBox klx="-2.5" khx="2.5" kly="-2.5" khy="2.5"/>
</serpbox>
</nodeLayer>
<nodeLayer layer="Diffusion" style="FILLED" portNum="3" electrical="true">
<serpbox kly="0.0" lWidth="3.0" rWidth="0.0" tExtent="0.0" bExtent="0.0">
<lambdaBox klx="-1.0" khx="1.0" kly="0.0" khy="3.0"/>
</serpbox>
</nodeLayer>
<nodeLayer layer="Diffusion" style="FILLED" portNum="1" electrical="true">
<serpbox khy="0.0" lWidth="0.0" rWidth="3.0" tExtent="0.0" bExtent="0.0">
<lambdaBox klx="-1.0" khx="1.0" kly="-3.0" khy="0.0"/>
</serpbox>
</nodeLayer>
<primitivePort name="imp-trans-poly-left">
<portAngle primary="180" range="85"/>
<portTopology>0</portTopology>
<box khx="-1.0">
<lambdaBox klx="-2.0" khx="-2.0" kly="0.0" khy="0.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
<primitivePort name="imp-trans-diff-top">
<portAngle primary="90" range="85"/>
<portTopology>1</portTopology>
<box kly="1.0">
<lambdaBox klx="0.0" khx="0.0" kly="2.0" khy="2.0"/>
</box>
<portArc>Diffusion</portArc>
</primitivePort>
<primitivePort name="imp-trans-poly-right">
<portAngle primary="0" range="85"/>
<portTopology>0</portTopology>
<box klx="1.0">
<lambdaBox klx="2.0" khx="2.0" kly="0.0" khy="0.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
<primitivePort name="imp-trans-diff-bottom">
<portAngle primary="270" range="85"/>
<portTopology>3</portTopology>
<box khy="-1.0">
<lambdaBox klx="0.0" khx="0.0" kly="-2.0" khy="-2.0"/>
</box>
<portArc>Diffusion</portArc>
</primitivePort>
<serpTrans>
<specialValue>4.0</specialValue>
<specialValue>1.0</specialValue>
<specialValue>1.0</specialValue>
<specialValue>2.0</specialValue>
<specialValue>1.0</specialValue>
<specialValue>1.0</specialValue>
</serpTrans>
</primitiveNode>
<primitiveNode name="Buried-Con-Cross-S" fun="CONNECT">
<diskOffset untilVersion="2" x="2.0" y="2.0"/>
<nodeBase>
<box>
<lambdaBox klx="-2.0" khx="2.0" kly="-2.0" khy="2.0"/>
</box>
</nodeBase>
<nodeLayer layer="Diffusion" style="FILLED">
<box>
<lambdaBox klx="-2.0" khx="2.0" kly="-1.0" khy="1.0"/>
</box>
</nodeLayer>
<nodeLayer layer="Buried-Contact" style="FILLED">
<box>
<lambdaBox klx="-2.0" khx="2.0" kly="-2.0" khy="2.0"/>
</box>
</nodeLayer>
<nodeLayer layer="Polysilicon" style="FILLED">
<box>
<lambdaBox klx="0.0" khx="2.0" kly="-2.0" khy="2.0"/>
</box>
</nodeLayer>
<primitivePort name="bur-diff-left">
<portAngle primary="180" range="45"/>
<portTopology>0</portTopology>
<box khx="-1.0">
<lambdaBox klx="-1.0" khx="-1.0" kly="0.0" khy="0.0"/>
</box>
<portArc>Diffusion</portArc>
</primitivePort>
<primitivePort name="bur-poly-bottom">
<portAngle primary="270" range="45"/>
<portTopology>0</portTopology>
<box khy="-1.0">
<lambdaBox klx="1.0" khx="1.0" kly="-1.0" khy="-1.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
<primitivePort name="bur-poly-top">
<portAngle primary="90" range="45"/>
<portTopology>0</portTopology>
<box kly="1.0">
<lambdaBox klx="1.0" khx="1.0" kly="1.0" khy="1.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
<primitivePort name="bur-end-right">
<portAngle primary="0" range="45"/>
<portTopology>0</portTopology>
<box>
<lambdaBox klx="1.0" khx="1.0" kly="0.0" khy="0.0"/>
</box>
<portArc>Diffusion</portArc>
<portArc>Polysilicon</portArc>
</primitivePort>
</primitiveNode>
<primitiveNode name="Buried-Con-Cross-T" fun="CONNECT">
<diskOffset untilVersion="2" x="2.5" y="2.0"/>
<nodeBase>
<box>
<lambdaBox klx="-2.5" khx="2.5" kly="-2.0" khy="2.0"/>
</box>
</nodeBase>
<nodeLayer layer="Diffusion" style="FILLED">
<box>
<lambdaBox klx="-2.5" khx="2.5" kly="-1.0" khy="1.0"/>
</box>
</nodeLayer>
<nodeLayer layer="Buried-Contact" style="FILLED">
<box>
<lambdaBox klx="-2.5" khx="2.5" kly="-2.0" khy="2.0"/>
</box>
</nodeLayer>
<nodeLayer layer="Polysilicon" style="FILLED">
<box>
<lambdaBox klx="-0.5" khx="1.5" kly="-2.0" khy="2.0"/>
</box>
</nodeLayer>
<primitivePort name="bur-poly-top">
<portAngle primary="90" range="45"/>
<portTopology>0</portTopology>
<box kly="1.0">
<lambdaBox klx="0.5" khx="0.5" kly="1.0" khy="1.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
<primitivePort name="bur-poly-bottom">
<portAngle primary="270" range="45"/>
<portTopology>0</portTopology>
<box khy="-1.0">
<lambdaBox klx="0.5" khx="0.5" kly="-1.0" khy="-1.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
<primitivePort name="bur-diff-left">
<portAngle primary="180" range="45"/>
<portTopology>0</portTopology>
<box khx="-1.0">
<lambdaBox klx="-1.5" khx="-1.5" kly="0.0" khy="0.0"/>
</box>
<portArc>Diffusion</portArc>
</primitivePort>
</primitiveNode>
<primitiveNode name="Buried-Con-Polysurr" fun="CONNECT">
<diskOffset untilVersion="2" x="2.5" y="2.0"/>
<nodeBase>
<box>
<lambdaBox klx="-2.5" khx="2.5" kly="-2.0" khy="2.0"/>
</box>
</nodeBase>
<nodeLayer layer="Polysilicon" style="FILLED">
<box>
<lambdaBox klx="-0.5" khx="2.5" kly="-2.0" khy="2.0"/>
</box>
</nodeLayer>
<nodeLayer layer="Buried-Contact" style="FILLED">
<box>
<lambdaBox klx="-2.5" khx="2.5" kly="-2.0" khy="2.0"/>
</box>
</nodeLayer>
<nodeLayer layer="Diffusion" style="FILLED">
<box>
<lambdaBox klx="-2.5" khx="1.5" kly="-1.0" khy="1.0"/>
</box>
</nodeLayer>
<primitivePort name="bur-diff-left">
<portAngle primary="180" range="45"/>
<portTopology>0</portTopology>
<box khx="-1.0">
<lambdaBox klx="-1.5" khx="-1.5" kly="0.0" khy="0.0"/>
</box>
<portArc>Diffusion</portArc>
</primitivePort>
<primitivePort name="bur-poly-3">
<portAngle primary="0" range="135"/>
<portTopology>0</portTopology>
<box>
<lambdaBox klx="0.5" khx="1.5" kly="-1.0" khy="1.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
<primitivePort name="bur-poly-1">
<portAngle primary="0" range="135"/>
<portTopology>0</portTopology>
<box>
<lambdaBox klx="0.5" khx="1.5" kly="-1.0" khy="1.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
<primitivePort name="bur-poly-2">
<portAngle primary="0" range="135"/>
<portTopology>0</portTopology>
<box>
<lambdaBox klx="0.5" khx="1.5" kly="-1.0" khy="1.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
</primitiveNode>
<primitiveNode name="Buried-Con-Diffsurr-I" fun="CONNECT">
<diskOffset untilVersion="2" x="2.5" y="2.0"/>
<nodeBase>
<box>
<lambdaBox klx="-2.5" khx="2.5" kly="-2.0" khy="2.0"/>
</box>
</nodeBase>
<nodeLayer layer="Polysilicon" style="FILLED">
<box>
<lambdaBox klx="-0.5" khx="2.5" kly="-1.0" khy="1.0"/>
</box>
</nodeLayer>
<nodeLayer layer="Diffusion" style="FILLED">
<points/>
<techPoint xm="-0.5" xa="-2.5" ym="-0.5" ya="-1.0"/>
<techPoint xm="-0.5" xa="-2.5" ym="0.5" ya="1.0"/>
<techPoint xm="-0.5" xa="-1.5" ym="0.5" ya="1.0"/>
<techPoint xm="-0.5" xa="-1.5" ym="0.5" ya="2.0"/>
<techPoint xm="0.5" xa="1.5" ym="0.5" ya="2.0"/>
<techPoint xm="0.5" xa="1.5" ym="-0.5" ya="-2.0"/>
<techPoint xm="-0.5" xa="-1.5" ym="-0.5" ya="-2.0"/>
<techPoint xm="-0.5" xa="-1.5" ym="-0.5" ya="-1.0"/>
</nodeLayer>
<nodeLayer layer="Buried-Contact" style="FILLED">
<box>
<lambdaBox klx="-2.5" khx="2.5" kly="-2.0" khy="2.0"/>
</box>
</nodeLayer>
<primitivePort name="bur-diff-left">
<portAngle primary="180" range="45"/>
<portTopology>0</portTopology>
<box khx="-1.0">
<lambdaBox klx="-1.5" khx="-1.5" kly="0.0" khy="0.0"/>
</box>
<portArc>Diffusion</portArc>
</primitivePort>
<primitivePort name="bur-poly-right">
<portAngle primary="0" range="45"/>
<portTopology>0</portTopology>
<box klx="1.0">
<lambdaBox klx="1.5" khx="1.5" kly="0.0" khy="0.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
</primitiveNode>
<primitiveNode name="Buried-Con-Diffsurr-T" fun="CONNECT">
<diskOffset untilVersion="2" x="3.0" y="2.0"/>
<nodeBase>
<box>
<lambdaBox klx="-3.0" khx="3.0" kly="-2.0" khy="2.0"/>
</box>
</nodeBase>
<nodeLayer layer="Polysilicon" style="FILLED">
<box>
<lambdaBox klx="-1.0" khx="1.0" kly="-1.0" khy="2.0"/>
</box>
</nodeLayer>
<nodeLayer layer="Diffusion" style="FILLED">
<points/>
<techPoint xm="-0.5" xa="-3.0" ym="-0.5" ya="-2.0"/>
<techPoint xm="-0.5" xa="-3.0" ym="0.5" ya="0.0"/>
<techPoint xm="-0.5" xa="-2.0" ym="0.5" ya="0.0"/>
<techPoint xm="-0.5" xa="-2.0" ym="0.5" ya="1.0"/>
<techPoint xm="0.5" xa="2.0" ym="0.5" ya="1.0"/>
<techPoint xm="0.5" xa="2.0" ym="0.5" ya="0.0"/>
<techPoint xm="0.5" xa="3.0" ym="0.5" ya="0.0"/>
<techPoint xm="0.5" xa="3.0" ym="-0.5" ya="-2.0"/>
</nodeLayer>
<nodeLayer layer="Buried-Contact" style="FILLED">
<box>
<lambdaBox klx="-3.0" khx="3.0" kly="-2.0" khy="2.0"/>
</box>
</nodeLayer>
<primitivePort name="bur-diff-left">
<portAngle primary="180" range="45"/>
<portTopology>0</portTopology>
<box khx="-1.0">
<lambdaBox klx="-2.0" khx="-2.0" kly="-1.0" khy="-1.0"/>
</box>
<portArc>Diffusion</portArc>
</primitivePort>
<primitivePort name="bur-poly-top">
<portAngle primary="90" range="45"/>
<portTopology>0</portTopology>
<box kly="1.0">
<lambdaBox klx="0.0" khx="0.0" kly="1.0" khy="1.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
<primitivePort name="bur-diff-right">
<portAngle primary="0" range="45"/>
<portTopology>0</portTopology>
<box klx="1.0">
<lambdaBox klx="2.0" khx="2.0" kly="-1.0" khy="-1.0"/>
</box>
<portArc>Diffusion</portArc>
</primitivePort>
</primitiveNode>
<primitiveNode name="Buried-Con-Diffsurr-L" fun="CONNECT">
<diskOffset untilVersion="2" x="2.5" y="2.0"/>
<nodeBase>
<box>
<lambdaBox klx="-2.5" khx="2.5" kly="-2.0" khy="2.0"/>
</box>
</nodeBase>
<nodeLayer layer="Buried-Contact" style="FILLED">
<box>
<lambdaBox klx="-2.5" khx="2.5" kly="-2.0" khy="2.0"/>
</box>
</nodeLayer>
<nodeLayer layer="Polysilicon" style="FILLED">
<box>
<lambdaBox klx="-0.5" khx="1.5" kly="-1.0" khy="2.0"/>
</box>
</nodeLayer>
<nodeLayer layer="Diffusion" style="FILLED">
<points/>
<techPoint xm="-0.5" xa="-2.5" ym="-0.5" ya="-2.0"/>
<techPoint xm="-0.5" xa="-2.5" ym="0.5" ya="0.0"/>
<techPoint xm="-0.5" xa="-1.5" ym="0.5" ya="0.0"/>
<techPoint xm="-0.5" xa="-1.5" ym="0.5" ya="1.0"/>
<techPoint xm="0.5" xa="2.5" ym="0.5" ya="1.0"/>
<techPoint xm="0.5" xa="2.5" ym="-0.5" ya="-2.0"/>
</nodeLayer>
<primitivePort name="bur-diff-left">
<portAngle primary="180" range="45"/>
<portTopology>0</portTopology>
<box khx="-1.0">
<lambdaBox klx="-1.5" khx="-1.5" kly="-1.0" khy="-1.0"/>
</box>
<portArc>Diffusion</portArc>
</primitivePort>
<primitivePort name="bur-poly-top">
<portAngle primary="90" range="45"/>
<portTopology>0</portTopology>
<box kly="1.0">
<lambdaBox klx="0.5" khx="0.5" kly="1.0" khy="1.0"/>
</box>
<portArc>Polysilicon</portArc>
</primitivePort>
</primitiveNode>
<spiceHeader level="1">
<spiceLine line="*NMOS 4UM PROCESS"/>
<spiceLine line=".OPTIONS DEFL=4UM DEFW=4UM DEFAS=80PM^2 DEFAD=80PM^2"/>
<spiceLine line=".MODEL N NMOS LEVEL=1 VTO=1.1 KP=33UA/V^2 TOX=68NM GAMMA=.41"/>
<spiceLine line="+ LAMBDA=0.05 CGSO=0.18NF/M CGDO=0.18NF/M LD=0.4UM"/>
<spiceLine line="+ JS=.2A/M^2 CJ=.11MF/M^2"/>
<spiceLine line=".MODEL D NMOS LEVEL=1 VTO=-3.4 KP=31UA/V^2 TOX=68NM GAMMA=.44"/>
<spiceLine line="+ LAMBDA=0.05 CGSO=0.18NF/M CGDO=0.18NF/M LD=0.4UM"/>
<spiceLine line="+ JS=.2A/M^2 CJ=.11MF/M^2"/>
<spiceLine line=".MODEL DIFFCAP D CJO=.11MF/M^2"/>
</spiceHeader>
<spiceHeader level="3">
<spiceLine line="*NMOS 4UM PROCESS"/>
<spiceLine line=".OPTIONS DEFL=4UM DEFW=4UM DEFAS=80PM^2 DEFAD=80PM^2"/>
<spiceLine line="* RSH SET TO ZERO (MOSIS: RSH = 12)"/>
<spiceLine line=".MODEL N NMOS LEVEL=3 VTO=0.849 LD=0.17U KP=2.98E-5 GAMMA=0.552"/>
<spiceLine line="+PHI=0.6 TOX=0.601E-7 NSUB=2.11E15 NSS=0 NFS=8.89E11 TPG=1 XJ=7.73E-7"/>
<spiceLine line="+UO=400 UEXP=1E-3 UCRIT=1.74E5 VMAX=1E5 NEFF=1E-2 DELTA=1.19"/>
<spiceLine line="+THETA=9.24E-3 ETA=0.77 KAPPA=3.25 RSH=0 CGSO=1.6E-10 CGDO=1.6E-10"/>
<spiceLine line="+CGBO=1.7E-10 CJ=1.1E-4 MJ=0.5 CJSW=1E-9"/>
<spiceLine line=".MODEL D NMOS LEVEL=3 VTO=-3.07 LD=0.219U KP=2.76E-5 GAMMA=0.315"/>
<spiceLine line="+PHI=0.6 TOX=0.601E-7 NSUB=8.76E14 NSS=0 NFS=4.31E12 TPG=1 XJ=0.421U"/>
<spiceLine line="+UO=650 UEXP=1E-3 UCRIT=8.05E5 VMAX=1.96E5 NEFF=1E-2 DELTA=2.41"/>
<spiceLine line="+THETA=0 ETA=2.0 KAPPA=0.411 RSH=0 CGSO=1.6E-10 CGDO=1.6E-10"/>
<spiceLine line="+CGBO=1.7E-10 CJ=1.1E-4 MJ=0.5 CJSW=1E-9"/>
<spiceLine line="*MOSIS IS NOT RESPONSIBLE FOR THE FOLLOWING DIOD DATA"/>
<spiceLine line=".MODEL DIFFCAP D CJO=.11MF/m^2"/>
</spiceHeader>
<menuPalette numColumns="3">
<menuBox>
<menuArc>Metal</menuArc>
</menuBox>
<menuBox>
<menuNodeInst protoName="Metal-Pin" function="PIN"/>
</menuBox>
<menuBox>
<menuNode>Butting-Con</menuNode>
</menuBox>
<menuBox>
<menuArc>Polysilicon</menuArc>
</menuBox>
<menuBox>
<menuNodeInst protoName="Polysilicon-Pin" function="PIN"/>
</menuBox>
<menuBox>
<menuNode>Metal-Polysilicon-Con</menuNode>
</menuBox>
<menuBox>
<menuArc>Diffusion</menuArc>
</menuBox>
<menuBox>
<menuNodeInst protoName="Diffusion-Pin" function="PIN"/>
</menuBox>
<menuBox>
<menuNode>Metal-Diffusion-Con</menuNode>
</menuBox>
<menuBox>
<menuNode>Buried-Con-Cross</menuNode>
</menuBox>
<menuBox>
<menuNode>Transistor</menuNode>
</menuBox>
<menuBox>
<menuNode>Implant-Transistor</menuNode>
</menuBox>
<menuBox>
<menuNode>Buried-Con-Cross-S</menuNode>
</menuBox>
<menuBox>
<menuNode>Buried-Con-Cross-T</menuNode>
</menuBox>
<menuBox>
<menuNode>Buried-Con-Polysurr</menuNode>
</menuBox>
<menuBox>
<menuNode>Buried-Con-Diffsurr-I</menuNode>
</menuBox>
<menuBox>
<menuNode>Buried-Con-Diffsurr-T</menuNode>
</menuBox>
<menuBox>
<menuNode>Buried-Con-Diffsurr-L</menuNode>
</menuBox>
<menuBox>
<menuText>Pure</menuText>
</menuBox>
<menuBox>
<menuText>Misc.</menuText>
</menuBox>
<menuBox>
<menuText>Cell</menuText>
</menuBox>
</menuPalette>
<Foundry name="NONE">
<LayerRule ruleName="W_4" layerName="Contact-Cut" type="MINWID" when="ALL" value="2.0"/>
<LayersRule ruleName="U_0_0" layerNames="{Metal,Metal}" type="UCONSPA" when="ALL" value="3.0"/>
<LayersRule ruleName="U_1_1" layerNames="{Polysilicon,Polysilicon}" type="UCONSPA" when="ALL" value="2.0"/>
<LayersRule ruleName="C_1_2" layerNames="{Polysilicon,Diffusion}" type="CONSPA" when="ALL" value="0.0"/>
<LayersRule ruleName="U_1_2" layerNames="{Polysilicon,Diffusion}" type="UCONSPA" when="ALL" value="1.0"/>
<LayersRule ruleName="U_1_3" layerNames="{Polysilicon,Implant}" type="UCONSPA" when="ALL" value="1.0"/>
<LayersRule ruleName="U_1_5" layerNames="{Polysilicon,Buried-Contact}" type="UCONSPA" when="ALL" value="2.0"/>
<LayersRule ruleName="U_2_2" layerNames="{Diffusion,Diffusion}" type="UCONSPA" when="ALL" value="3.0"/>
<LayersRule ruleName="U_2_3" layerNames="{Diffusion,Implant}" type="UCONSPA" when="ALL" value="2.0"/>
<LayersRule ruleName="U_2_5" layerNames="{Diffusion,Buried-Contact}" type="UCONSPA" when="ALL" value="2.0"/>
<LayersRule ruleName="U_3_11" layerNames="{Implant,Transistor}" type="UCONSPA" when="ALL" value="2.0"/>
<LayersRule ruleName="C_4_4" layerNames="{Contact-Cut,Contact-Cut}" type="CONSPA" when="ALL" value="2.0"/>
<LayersRule ruleName="U_4_11" layerNames="{Contact-Cut,Transistor}" type="UCONSPA" when="ALL" value="2.0"/>
</Foundry>
</technology>